Welcome to: FYSD13 Physics: Processing and Device Technology, 7.5 credits
Welcome to the homepage of the course "Processing and Device Technology".
Form of teaching
|The purpose of this course is to provide fundamental knowledge about fabrication and characterization of semiconductor devices on the nanometer scale. The focus is set on modern materials and processing techniques with nanotechnology as a main theme. Most of the processes are general and are applied in traditional Si based IC technology as well as in advanced III-V technology and MEMS/NEMS fabrication.|
Materials properties of semiconductors. Device fabrication: process overview, comparison between III/V and Si. Processes: Epitaxy, doping, ion implantation, diffusion, etching, lithography. Recent methods as e.g. surface functionalization and nanoimprint lithography will also be treated. Metal-semiconductor interfaces, which are of significant importance in a number of applications will be covered. Fabrication and applications of p-n junction diodes and characterization and modeling of their electronic and optoelectronic properties. Fabrication and principles for MEMS/NEMS (micro/nano-electromechanical systems) will also be treated. In a number of laboratory exercises, some of the covered process steps will be applied in order to make working devices. Since it is highly important that semiconductor processing is carried out in a clean and dust free environment, strong emphasis will be put on clean room work methods. Finally, some advanced semiconductor structures and their properties will be demonstrated.
Term: Autumn Period: 1|
Coordinator: Claes Thelander
LTH course code: FFFF10
|We will have two lectures per week (Tuesdays and Thursdays), and one seminar (offered Wednesdays and Thursdays). There will be, in total, four laboratory exercises, where the lab report (one report for all four labs) should be written individually. The course will be given in English.||
Lectures: 24 hours|
Labs: 16 hours
Seminars: 12 hours
|The examination consists of lab exercises, an independently written lab-report (in English, grade: pass/fail)), and a written exam (graded)..|
|Grading scale: U-G-VG|
Semiconductor Devices: Physics and Technology, 3rd Edition, International student version, by Simon M. Sze, Ming-Kwei Lee. This book can be bought at KFS in Lund (www.kfsab.se) at a discounted price, roughly 750 SEK. This course (FFF110) will primarily cover the second "technology" half of the book, whereas the course FFF021 (optional 4th year course in the Nanoscience program) will cover the first "physics" half.